Hot cathode ionization gauge

The regulation is a typical three-pole box structure, using a noble metal oxide cathode, which has the characteristics of oxidation resistance and transient atmospheric impact resistance, stable performance and long service life, and is suitable for medium and high vacuum measurement.

technical parameter:

1. Measurement range: 6.5×101 ～ 1×10-4 Pa.

2. X-ray limit: 3×10-4 Pa

3. Regulatory sensitivity: 0.015±15%Pa-1

4, working parameters:

Accelerated pole to ground potential: 165V

Cathode to ground potential: 50V

Collect pole to ground potential: 0V

Emission current: 50uA (1 × 102 ~ 1 × 10-2 Pa)

500uA (1×10-2 to 1×10-4Pa)

5. In the range of 102 to 6 × 101 Pa, 3 × 10 -4 Pa to 1 × 10 -4 Pa, only for reference measurement.

6, vacuum connection form and baking temperature:

Φ15.5±0.5 glass 80°C

Φ15.5±0.1 metal 80°C

KF10 quick release flange 80°C

KF16 quick release flange 80°C

KF25 quick release flange 80°C

KF40 quick release flange 80°C

CF16 super high flange 450°C

CF25 super high flange 450°C

CF35 super high flange 450°C